微机电系统技术及应用

Learn about Micro-Electro-Mechanical Systems (MEMS) technology and its applications in this comprehensive course from Tsinghua University. Master fundamental concepts including microscale effects, MEMS fabrication techniques, semiconductor planar processing, lithography, thin film deposition, etching, and doping processes. Explore various MEMS devices such as micro-piezoresistive pressure sensors, silicon microphones, micro-inertial sensors, accelerometers, gyroscopes, electrostatic microactuators, piezoelectric actuators, and microfluidic devices. Understand working principles, microscale characteristics, signal detection methods, fabrication processes, and packaging solutions for each device type. Examine practical applications including inertial measurement units, piezoelectric mirrors, micropumps, and chip-based PCR systems. Gain hands-on experience through case studies and engage in final exam discussions to solidify understanding of MEMS technology integration and implementation.