AIM System: Automated Lithography Process Monitoring and Measurement for Semiconductor Manufacturing

Learn about the innovative AIM (All wafer Intelligent Monitoring) system for semiconductor manufacturing in this technical conference presentation from SK TECH SUMMIT 2022. Explore how this groundbreaking system automates measurement processes in lithography, traditionally a challenging balance between quality control and production efficiency. Discover how AIM revolutionizes semiconductor manufacturing by replacing traditional Macro/CD measurement steps with camera module-based image analysis, enabling defect/CD prediction and yield impact assessment without compromising productivity. Gain insights from SK Hynix engineer Junho Noh's expertise in implementing this system that achieves 100% wafer inspection without production loss, marking a significant advancement in semiconductor process innovation.