Overview
Syllabus
Like driving a car: acquiring quality SEM/FESEM images in different situations
About me
Dalian
Outline
Springtail cuticles Sample curtesy: Lin Wang
Etched Si mushroom structure Sample curtesy: Lin Wang
Slide 7: Untitled
Etched Si grating Sample curtesy: Fabin Grise
WSe2/Graphene 0.2KV
MoS2/0.2KV Sample curtsey: Kevin Lu
3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
Charging effect
Polystyrene latex coated with Au
Untitled: Slide 14
SE2 1KV/7.1mm
Outline
Key imaging parameters
Working Distance WD Smaller WD, better resolution
Working distance & detectors
Choice of detectors
Untitled: Slide 21
Choice of beam voltage
Electron and sample interaction
Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
WSe2/0.5 kV
Block Copolymer Sample Curtesy: Karthik Arunagiri
20% Ce on Al2O3 particle
X-ray emission & EDS
Device EDS Mapping
Outline
Merlin
G500
G500: Excellent resolution at low KV
GEMINI I column G500
GEMINI II column Merlin
Ultra
Outline
A simplified ray diagram of SEM
Scanning-move the beam!
Magnification?
Merlin: Large field of view
Ideal beam?
Electron beam is a probe, just like your pencil
Tip size matters!
Tip shape matters too!
How does the beam shape affect SEM image?
Ideal beam?
How to achieve sharp beam on FESEM?
- focus
Which component control beam shape?
- Stigmation/stigmatism
Mechanism to correct stigmation Stigmators x/y
Ray diagram of a stigmated lens
under
How to correct stigmation
How to test when stigmation is corrected?
- stigmation
Why straight beam?
What happens when aperture is off?
How do you know when aperture is off?
- x/y alignment
5 controls needed to correct the beam
Questions?
The Nanofabrication Lab
Taught by
nanohubtechtalks