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Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car

Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car

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Like driving a car: acquiring quality SEM/FESEM images in different situations

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Like driving a car: acquiring quality SEM/FESEM images in different situations

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Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car

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  1. 1 Like driving a car: acquiring quality SEM/FESEM images in different situations
  2. 2 About me
  3. 3 Dalian
  4. 4 Outline
  5. 5 Springtail cuticles Sample curtesy: Lin Wang
  6. 6 Etched Si mushroom structure Sample curtesy: Lin Wang
  7. 7 Slide 7: Untitled
  8. 8 Etched Si grating Sample curtesy: Fabin Grise
  9. 9 WSe2/Graphene 0.2KV
  10. 10 MoS2/0.2KV Sample curtsey: Kevin Lu
  11. 11 3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
  12. 12 Charging effect
  13. 13 Polystyrene latex coated with Au
  14. 14 Untitled: Slide 14
  15. 15 SE2 1KV/7.1mm
  16. 16 Outline
  17. 17 Key imaging parameters
  18. 18 Working Distance WD Smaller WD, better resolution
  19. 19 Working distance & detectors
  20. 20 Choice of detectors
  21. 21 Untitled: Slide 21
  22. 22 Choice of beam voltage
  23. 23 Electron and sample interaction
  24. 24 Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
  25. 25 Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
  26. 26 WSe2/0.5 kV
  27. 27 Block Copolymer Sample Curtesy: Karthik Arunagiri
  28. 28 20% Ce on Al2O3 particle
  29. 29 X-ray emission & EDS
  30. 30 Device EDS Mapping
  31. 31 Outline
  32. 32 Merlin
  33. 33 G500
  34. 34 G500: Excellent resolution at low KV
  35. 35 GEMINI I column G500
  36. 36 GEMINI II column Merlin
  37. 37 Ultra
  38. 38 Outline
  39. 39 A simplified ray diagram of SEM
  40. 40 Scanning-move the beam!
  41. 41 Magnification?
  42. 42 Merlin: Large field of view
  43. 43 Ideal beam?
  44. 44 Electron beam is a probe, just like your pencil
  45. 45 Tip size matters!
  46. 46 Tip shape matters too!
  47. 47 How does the beam shape affect SEM image?
  48. 48 Ideal beam?
  49. 49 How to achieve sharp beam on FESEM?
  50. 50 - focus
  51. 51 Which component control beam shape?
  52. 52 - Stigmation/stigmatism
  53. 53 Mechanism to correct stigmation Stigmators x/y
  54. 54 Ray diagram of a stigmated lens
  55. 55 under
  56. 56 How to correct stigmation
  57. 57 How to test when stigmation is corrected?
  58. 58 - stigmation
  59. 59 Why straight beam?
  60. 60 What happens when aperture is off?
  61. 61 How do you know when aperture is off?
  62. 62 - x/y alignment
  63. 63 5 controls needed to correct the beam
  64. 64 Questions?
  65. 65 The Nanofabrication Lab

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