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Dalian
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Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car
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- 1 Like driving a car: acquiring quality SEM/FESEM images in different situations
- 2 About me
- 3 Dalian
- 4 Outline
- 5 Springtail cuticles Sample curtesy: Lin Wang
- 6 Etched Si mushroom structure Sample curtesy: Lin Wang
- 7 Slide 7: Untitled
- 8 Etched Si grating Sample curtesy: Fabin Grise
- 9 WSe2/Graphene 0.2KV
- 10 MoS2/0.2KV Sample curtsey: Kevin Lu
- 11 3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
- 12 Charging effect
- 13 Polystyrene latex coated with Au
- 14 Untitled: Slide 14
- 15 SE2 1KV/7.1mm
- 16 Outline
- 17 Key imaging parameters
- 18 Working Distance WD Smaller WD, better resolution
- 19 Working distance & detectors
- 20 Choice of detectors
- 21 Untitled: Slide 21
- 22 Choice of beam voltage
- 23 Electron and sample interaction
- 24 Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
- 25 Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
- 26 WSe2/0.5 kV
- 27 Block Copolymer Sample Curtesy: Karthik Arunagiri
- 28 20% Ce on Al2O3 particle
- 29 X-ray emission & EDS
- 30 Device EDS Mapping
- 31 Outline
- 32 Merlin
- 33 G500
- 34 G500: Excellent resolution at low KV
- 35 GEMINI I column G500
- 36 GEMINI II column Merlin
- 37 Ultra
- 38 Outline
- 39 A simplified ray diagram of SEM
- 40 Scanning-move the beam!
- 41 Magnification?
- 42 Merlin: Large field of view
- 43 Ideal beam?
- 44 Electron beam is a probe, just like your pencil
- 45 Tip size matters!
- 46 Tip shape matters too!
- 47 How does the beam shape affect SEM image?
- 48 Ideal beam?
- 49 How to achieve sharp beam on FESEM?
- 50 - focus
- 51 Which component control beam shape?
- 52 - Stigmation/stigmatism
- 53 Mechanism to correct stigmation Stigmators x/y
- 54 Ray diagram of a stigmated lens
- 55 under
- 56 How to correct stigmation
- 57 How to test when stigmation is corrected?
- 58 - stigmation
- 59 Why straight beam?
- 60 What happens when aperture is off?
- 61 How do you know when aperture is off?
- 62 - x/y alignment
- 63 5 controls needed to correct the beam
- 64 Questions?
- 65 The Nanofabrication Lab
