ABOUT THE COURSE: Thin film technology is the backbone for building monolithically integrated semiconductor devices, modern computers, energy and healthcare systems.Varieties of metallic, semiconducting, superconducting and insulating materials with controlled mechanical, electrical and optical properties are integrated today to form hetrostructures and superlattices for advanced functional devices and systems, Theis an interdisciplinary elective course suitable for undergraduate and postgraduate engineering and science students covering the technologies forfthin film deposition, characterization and fabrication of nanoscaledevices.INTENDED AUDIENCE: PG and UG students of Electronics engineering, Metallurgical & materials engineering, Chemical engineering, Bio engineering and PhD and M.Sc. students of Physics, Chemistry and Materials SciencesPREREQUISITES: UG course on Solid State Physics, Introduction to Materials or Basic ElectronicsINDUSTRY SUPPORT: 1. Applied Materials2. SCL Chandigarh3. Micron Technology4. BHEL5. Tata steel
Overview
Syllabus
Week 1:Course introduction with a review on materials science
Week 2:Physical vapor deposition of thin films-I : Thermal and electron beam assisted deposition
Week 3:Physical vapour deposition of thin films-II : Plasma, Ion beam and laser assisted deposition
Week 4:Pulsed laser deposition and hybrid methods
Week 5:Chemical vapor deposition of thin films
Week 6:Epitaxial growth of thin films for device applications including MOCVD and molecular beam epitaxy (MBE)
Week 7:Theory of nucleation and growth of thin films
Week 8:Mechanical, structural and optical characterization of thin films
Week 9:Surface and interface characterization of films and heterostructures
Week 10:Thin film nanofabrication technology
Week 11:Thin film electronic, optoelectronic and energy devices
Week 12:Emerging nanoscale and quantum devices
Week 2:Physical vapor deposition of thin films-I : Thermal and electron beam assisted deposition
Week 3:Physical vapour deposition of thin films-II : Plasma, Ion beam and laser assisted deposition
Week 4:Pulsed laser deposition and hybrid methods
Week 5:Chemical vapor deposition of thin films
Week 6:Epitaxial growth of thin films for device applications including MOCVD and molecular beam epitaxy (MBE)
Week 7:Theory of nucleation and growth of thin films
Week 8:Mechanical, structural and optical characterization of thin films
Week 9:Surface and interface characterization of films and heterostructures
Week 10:Thin film nanofabrication technology
Week 11:Thin film electronic, optoelectronic and energy devices
Week 12:Emerging nanoscale and quantum devices
Taught by
Prof. Samit Kumar Ray
