Overview

This course is designed with an aim of educating students in microtechnology and its use to fabricate sensors and systems. The students will have an exposure to sensors and its importance in the real world. The students will also able to understand how to fabricate some of those sensors. Students will have an exposure towards how to fabricate the sensors and its application in real world. The students will provide an understanding on modern day microsensors and micro actuators. The students will have an idea about how to simulate some of those sensors and characterise before fabricating it. Below are some of the course objectives. The first objective of this course is to understand basics of sensors, actuators and their operating principle. The second objective is to educate the students on different types of microfabrication techniques for designing and developing sensors (Several applications from Electronics to Biomedical will be covered). The third objective is to explain working of various types of electrochemical sensors and actuators. Fourth objective is to provide information about interfacing of sensors and signal conditioning circuits to establish any control system or monitoring system. Fifth objective is to provide knowledge about simulation and characterization of different sensors. The final objective is to provide an understanding on characteristic parameters to evaluate sensor performance. INTENDED AUDIENCE: Engineering Students, Faculty from Engineering Colleges PREREQUISITES: Basic Electronics INDUSTRY SUPPORT: None

Syllabus

Week 1: Basics of Energy Transformation: Transducers, Sensors and Actuators Week 2: Understanding of thin film physics: Application in MOSFET and its variants Week 3: Thin Film Deposition Techniques: Chemical Vapor Deposition (APCVD, LPCVD, UHVCVD, PECVD, ALCVD, HPCVD, MOCVD) Week 4: Thin Film Deposition Techniques: Physical Vapor Deposition (Thermal Deposition, E-beam Evaporation, Sputtering, Pulsed Laser Deposition) Week 5: Basics understanding of Photolithography for pattering layer. Detailed overview of Etching methods. Week 6: Understanding various gas sensors: Optical gas sensor, Metal oxide semiconductor gas sensor, Field effect transistor gas sensor, Piezoelectric gas sensor, Polymer gas sensor, Nano-structured based gas sensors Week 7: Design and fabrication process of Microsensors: Force Sensors, Pressure Sensors, Strain gauges and practical applications Week 8: Explain working principles of Actuators. Piezoelectric and Piezoresistive actuators, micropumps and micro actuators with practical applications Week 9: Understanding basics of microfluidics to assist Photomask design using Clewin Software, pattern transfer techniques, PDMS moulding and degassing, device bonding techniques. Week 10: Simulation, Optimization and characterization of various sensors using COMSOL Multiphysics Week 11: Understanding of Sensor Interfacing with Microprocessor to build electronic system Week 12: Static and Dynamic Characteristic Parameters for Sensors and Actuators, Calibration of Sensor based electronics systems.