Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13

Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13

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EBL and IBL

40 of 46

40 of 46

EBL and IBL

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Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13

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  1. 1 Nano-Characterization and Nano-Fabrication using EB/IB tools
  2. 2 Table of Contents
  3. 3 Introduction to "Nano-World"
  4. 4 Nano/Micro/Macro World
  5. 5 Brief History of Characterization with Microscopes
  6. 6 Nano-Characterization
  7. 7 Nano-Fabrication
  8. 8 Semiconductor History
  9. 9 MOSFET Scaling
  10. 10 Optical Lithography
  11. 11 Optical Lithography
  12. 12 DUV and EUV Lithography
  13. 13 Photon-Based Lithography
  14. 14 Photon-Based Lithography
  15. 15 Lithography for Nano-Fabrication
  16. 16 Lithography for Nano-Fabrication
  17. 17 Electron Beam Lithography
  18. 18 Inside an IBM Quantum Chip
  19. 19 Photons and Electrons
  20. 20 Electron Beam Lithography
  21. 21 EBL Process
  22. 22 EBL Post Processing Pattern Transfer
  23. 23 COP/PMMA DL Lift-Off Process
  24. 24 Resolution Pattern
  25. 25 Resolution Test Results
  26. 26 Resolution Test Results: Lift-Off
  27. 27 EBL Post Processing Pattern Transfer
  28. 28 Zep REI Etch Process
  29. 29 Resolution Test Results: RIE Etch
  30. 30 EBL in Research Environment
  31. 31 EBL in Research Environment
  32. 32 Nano-Fabrication in Research Environment
  33. 33 Lithography for Nano-Fabrication
  34. 34 FIB/SEM
  35. 35 Electrons and Ga+ Ions
  36. 36 In-Solid Interaction
  37. 37 What can IB Do?
  38. 38 Examples: Fabrication of Plasmonic Antennas
  39. 39 EBL and IBL
  40. 40 EBL and IBL
  41. 41 Example 1: AFM Probe Modification
  42. 42 Example 2: Metal Tip Modification
  43. 43 Example 3: Cutting out a Slab with a Specific Crystallographic Orientation
  44. 44 FIB FIB-FESEM
  45. 45 FIB as Characterization Tool
  46. 46 Demo

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