Fabricating a MEMS Pressure Sensor - You Can Do This!

Fabricating a MEMS Pressure Sensor - You Can Do This!

nanohubtechtalks via YouTube Direct link

Singulation

46 of 53

46 of 53

Singulation

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Fabricating a MEMS Pressure Sensor - You Can Do This!

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  1. 1 Fabricating a MEMS Pressure Sensor – You Can Do This!
  2. 2 What are MEMS Pressure Sensors?
  3. 3 Why do we care?
  4. 4 Who Makes These?
  5. 5 Pressure Sensor Application
  6. 6 A Cool App for your phone Check out your pressure sensor!
  7. 7 Pressure Sensor How it Works
  8. 8 MTTC Pressure Sensor Process Overview
  9. 9 SCME/MTTC Pressure Sensor Process - Video
  10. 10 Backside Pattern Chamber – Hard Mask
  11. 11 Photolithography
  12. 12 Wafer Prep Deposition
  13. 13 Wafer Prep QDR/SRD Deposition
  14. 14 Coat
  15. 15 Expose
  16. 16 Develop
  17. 17 Microscope Inspection
  18. 18 Profilometer Inspection - DekTak
  19. 19 After Pattern, Before RIE Etch – Profiles
  20. 20 Program
  21. 21 After first 5min
  22. 22 After Etch before Resist Strip
  23. 23 Etch Inspect
  24. 24 Selectivity: What you want etched Vs Masking Material
  25. 25 Backside is now etched
  26. 26 Frontside Pattern – Dark or Bright Field?
  27. 27 Karl Suss MA6/BA6
  28. 28 Backside Alignment Microscopes
  29. 29 Pattern the Wheatstone Bridge
  30. 30 Alignment Details
  31. 31 Photolithography – Liftoff LOR5B
  32. 32 LOR5b Results - Inspect
  33. 33 Photolithography – Liftoff nLOF2070
  34. 34 nLOF2070 Results
  35. 35 So Far....
  36. 36 Sputter – CrAu or NiCr
  37. 37 Load
  38. 38 Load Wafer in Load Lock
  39. 39 Sputter Wafer Stage and Target
  40. 40 Select
  41. 41 Metal on Photoresist
  42. 42 Liftoff
  43. 43 Inspect
  44. 44 What's Next?
  45. 45 Chamber Etch – Anisotropic Wet Etching of Silicon in KOH!
  46. 46 Singulation
  47. 47 Dicing
  48. 48 Probe
  49. 49 • • • • WWW.SCME-SUPPORT.ORG
  50. 50 NEW: URE - UNDERGRADUATE RESEARCH EXPERIENCE TARGETING 2YR TECHNICIAN STUDENTS WITH THEIR FACULTY!
  51. 51 MNTESIG COMMUNITY
  52. 52 Want to Give it a shot?
  53. 53 QUESTIONS?

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