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Profilometer Inspection - DekTak
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Fabricating a MEMS Pressure Sensor - You Can Do This!
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- 1 Fabricating a MEMS Pressure Sensor – You Can Do This!
- 2 What are MEMS Pressure Sensors?
- 3 Why do we care?
- 4 Who Makes These?
- 5 Pressure Sensor Application
- 6 A Cool App for your phone Check out your pressure sensor!
- 7 Pressure Sensor How it Works
- 8 MTTC Pressure Sensor Process Overview
- 9 SCME/MTTC Pressure Sensor Process - Video
- 10 Backside Pattern Chamber – Hard Mask
- 11 Photolithography
- 12 Wafer Prep Deposition
- 13 Wafer Prep QDR/SRD Deposition
- 14 Coat
- 15 Expose
- 16 Develop
- 17 Microscope Inspection
- 18 Profilometer Inspection - DekTak
- 19 After Pattern, Before RIE Etch – Profiles
- 20 Program
- 21 After first 5min
- 22 After Etch before Resist Strip
- 23 Etch Inspect
- 24 Selectivity: What you want etched Vs Masking Material
- 25 Backside is now etched
- 26 Frontside Pattern – Dark or Bright Field?
- 27 Karl Suss MA6/BA6
- 28 Backside Alignment Microscopes
- 29 Pattern the Wheatstone Bridge
- 30 Alignment Details
- 31 Photolithography – Liftoff LOR5B
- 32 LOR5b Results - Inspect
- 33 Photolithography – Liftoff nLOF2070
- 34 nLOF2070 Results
- 35 So Far....
- 36 Sputter – CrAu or NiCr
- 37 Load
- 38 Load Wafer in Load Lock
- 39 Sputter Wafer Stage and Target
- 40 Select
- 41 Metal on Photoresist
- 42 Liftoff
- 43 Inspect
- 44 What's Next?
- 45 Chamber Etch – Anisotropic Wet Etching of Silicon in KOH!
- 46 Singulation
- 47 Dicing
- 48 Probe
- 49 • • • • WWW.SCME-SUPPORT.ORG
- 50 NEW: URE - UNDERGRADUATE RESEARCH EXPERIENCE TARGETING 2YR TECHNICIAN STUDENTS WITH THEIR FACULTY!
- 51 MNTESIG COMMUNITY
- 52 Want to Give it a shot?
- 53 QUESTIONS?
