Chemical Vapor Deposition: 2D Thin Films and 1D Nanowires - Lecture 6

Chemical Vapor Deposition: 2D Thin Films and 1D Nanowires - Lecture 6

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Outline

12 of 37

12 of 37

Outline

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Classroom Contents

Chemical Vapor Deposition: 2D Thin Films and 1D Nanowires - Lecture 6

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  1. 1 Chemical Vapor Deposition 2 Modes, 1D, 2D
  2. 2 Outline
  3. 3 Introduction
  4. 4 LPCVD
  5. 5 Outline
  6. 6 Form and Function
  7. 7 LPCVD Reactor
  8. 8 Batch LPCVD Horizontal Reactor
  9. 9 Automate Low Pressure Chemical Vapor Deposition
  10. 10 Automate LPCVD
  11. 11 Screen Capture of the Automate LPCVD Control Screen
  12. 12 Outline
  13. 13 Vapor Solid VS Growth
  14. 14 Thin Film Growth Sequence
  15. 15 What happens on the deposition surface?
  16. 16 Six Steps in VS Growth
  17. 17 Six Steps in VS Growth
  18. 18 Rate-Limiting Steps in VS Growth
  19. 19 Rate-Limiting Steps in VS Growth
  20. 20 Defects in VS Growth
  21. 21 Surface Reactions
  22. 22 Surface Reactions
  23. 23 VS Growth
  24. 24 VS Growth
  25. 25 VS LPCVD Thin Films Advantages
  26. 26 VS LPCVD Thin Films Disadvantages
  27. 27 Outline
  28. 28 Vapor-Liquid-Solid VLS Growth
  29. 29 Requirements for VLS Growth on a Crystalline Substrate
  30. 30 An Example: Silicon Nanowires Produced by Chemical Vapor Growth Using the Vapor-Liquid-Solid VLS Mechanism
  31. 31 VLS Growth
  32. 32 Deposition methods for catalysts
  33. 33 How Do You Choose a Catalyst for VLS Growth?
  34. 34 LPCVD Grown SiNWs
  35. 35 Silicon Nanowire as Bio-scaffolding
  36. 36 Silicon Nanowire as Bio-scaffolding
  37. 37 Any Questions?

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