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LPCVD
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Chemical Vapor Deposition: 2D Thin Films and 1D Nanowires - Lecture 6
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- 1 Chemical Vapor Deposition 2 Modes, 1D, 2D
- 2 Outline
- 3 Introduction
- 4 LPCVD
- 5 Outline
- 6 Form and Function
- 7 LPCVD Reactor
- 8 Batch LPCVD Horizontal Reactor
- 9 Automate Low Pressure Chemical Vapor Deposition
- 10 Automate LPCVD
- 11 Screen Capture of the Automate LPCVD Control Screen
- 12 Outline
- 13 Vapor Solid VS Growth
- 14 Thin Film Growth Sequence
- 15 What happens on the deposition surface?
- 16 Six Steps in VS Growth
- 17 Six Steps in VS Growth
- 18 Rate-Limiting Steps in VS Growth
- 19 Rate-Limiting Steps in VS Growth
- 20 Defects in VS Growth
- 21 Surface Reactions
- 22 Surface Reactions
- 23 VS Growth
- 24 VS Growth
- 25 VS LPCVD Thin Films Advantages
- 26 VS LPCVD Thin Films Disadvantages
- 27 Outline
- 28 Vapor-Liquid-Solid VLS Growth
- 29 Requirements for VLS Growth on a Crystalline Substrate
- 30 An Example: Silicon Nanowires Produced by Chemical Vapor Growth Using the Vapor-Liquid-Solid VLS Mechanism
- 31 VLS Growth
- 32 Deposition methods for catalysts
- 33 How Do You Choose a Catalyst for VLS Growth?
- 34 LPCVD Grown SiNWs
- 35 Silicon Nanowire as Bio-scaffolding
- 36 Silicon Nanowire as Bio-scaffolding
- 37 Any Questions?
