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PECVD
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Vacuum Function, Operation and Systems in Nanoscale Manufacturing - NACK S02
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- 1 Vacuum Function, Operation and Systems
- 2 Outline
- 3 Why is vacuum technology important?
- 4 Vacuum
- 5 Properties of Gases
- 6 Theory of Pressure
- 7 Atmospheric Pressure
- 8 Atmospheric Properties
- 9 Vacuum Ranges
- 10 Vacuum Ranges
- 11 Mean Free Path MFP
- 12 MFP and Molecular Density Versus Pressure
- 13 MFP and Molecular Density
- 14 Thermal Evaporator
- 15 System Design
- 16 MFP and System design
- 17 Outline
- 18 Vacuum Pumps
- 19 Typical Ranges for Vacuum pumps
- 20 Mechanical Pumps
- 21 Mechanical Pumps
- 22 Mechanical Pump System
- 23 Thermal Evaporator
- 24 Reactive Ion Etch
- 25 PECVD
- 26 Sputtering Tool
- 27 Mean Free Path
- 28 Problem with a Short Mean Free Path?
- 29 Mean Free Path
- 30 Example
