Vacuum Function, Operation and Systems in Nanoscale Manufacturing - NACK S02

Vacuum Function, Operation and Systems in Nanoscale Manufacturing - NACK S02

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Outline

17 of 30

17 of 30

Outline

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Vacuum Function, Operation and Systems in Nanoscale Manufacturing - NACK S02

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  1. 1 Vacuum Function, Operation and Systems
  2. 2 Outline
  3. 3 Why is vacuum technology important?
  4. 4 Vacuum
  5. 5 Properties of Gases
  6. 6 Theory of Pressure
  7. 7 Atmospheric Pressure
  8. 8 Atmospheric Properties
  9. 9 Vacuum Ranges
  10. 10 Vacuum Ranges
  11. 11 Mean Free Path MFP
  12. 12 MFP and Molecular Density Versus Pressure
  13. 13 MFP and Molecular Density
  14. 14 Thermal Evaporator
  15. 15 System Design
  16. 16 MFP and System design
  17. 17 Outline
  18. 18 Vacuum Pumps
  19. 19 Typical Ranges for Vacuum pumps
  20. 20 Mechanical Pumps
  21. 21 Mechanical Pumps
  22. 22 Mechanical Pump System
  23. 23 Thermal Evaporator
  24. 24 Reactive Ion Etch
  25. 25 PECVD
  26. 26 Sputtering Tool
  27. 27 Mean Free Path
  28. 28 Problem with a Short Mean Free Path?
  29. 29 Mean Free Path
  30. 30 Example

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