This course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging.
The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check your understanding of the lectures. To receive course certificate., you must score at least 60% of quiz within two chances.
Lecture notes, quiz and certificate are offered to registered students only.
Introduction to Semiconductor Process 2
Week 1 Wet & Dry Etch (1)
Week 2 Wet & Dry Etch (2)
Week 3 Thin Film Deposition (1)
Week 4 Thin Film Deposition (2)
Week 5 Metallization Chemical Mechanical Polishing Strain Engineering
Week 6 Electronic Packaging (1)
Week 7 Electronic Packaging (2)
Week 8 3D Transistor Process
Introduction to Semiconductor Process 1
Korea Advanced Institute of Science and Technology via Coursera
Overview
Syllabus
- Week 1 Overview of MOSFET theory
- Week 2 CMOS Process Integration
- Week 3 Cleanroom, RCA Cleaning Crystal Growth
- Week 4 Diffusion & Doping
- Week 5 Oxidation
- Week 6 Ion Implantation
- Week 7 Lithography
- Week 8 EUV Lithography
Taught by
Keon Jae Lee
