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ALD Lab
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Classroom Contents
Ion Implantation, Thermal Oxidation, and Atomic Layer Deposition - Lecture 7
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- 1 Ion Implantation, Thermal Oxidation and Atomic Layer Deposition
- 2 Ion Implantation
- 3 Implanting the Ions
- 4 Solid State Diffusion
- 5 Implanting the Ions
- 6 Implanting the Ions
- 7 An Ion Implanter
- 8 An Ion Implanter
- 9 An Ion Implanter
- 10 In Implantation Energy Loss Mechanisms
- 11 In Implantation Energy Loss Mechanisms
- 12 In Implantation Energy Loss Mechanisms
- 13 In Implantation Energy Loss Mechanisms
- 14 SRIM demo
- 15 TRIM demo
- 16 In Implantation Energy Loss Mechanisms
- 17 Channeling
- 18 Channeling
- 19 Crystal Damage
- 20 Crystal Damage
- 21 Crystal Damage
- 22 Crystal Damage
- 23 Crystal Damage
- 24 Ion Implant Lab
- 25 Ion Implant Lab
- 26 Ion Implant Lab
- 27 Ion Implantation Simulation Demo
- 28 Ion Implant Lab
- 29 Thermal Oxidation
- 30 Definitions
- 31 Uses of Oxides
- 32 Uses of Oxides
- 33 Uses of Oxides
- 34 Uses of Oxides
- 35 Uses of Oxides
- 36 Uses of Oxides
- 37 Oxide Structure
- 38 Oxide Structure
- 39 Oxide Growth Mechanisms
- 40 Oxide Growth Mechanisms
- 41 Oxide Growth Mechanisms
- 42 Oxide Growth Mechanisms
- 43 Oxide Growth Mechanisms
- 44 Oxide Growth Simulation Demo
- 45 Oxide Growth Mechanisms
- 46 Oxide Growth Mechanisms
- 47 Oxide Growth Mechanisms
- 48 Oxide Growth Simulation Demo
- 49 Oxide Growth Mechanisms
- 50 Oxide Growth Mechanisms
- 51 Oxide Growth Mechanisms
- 52 Oxide Growth Mechanisms
- 53 Thickness of the oxide
- 54 Quantum Tunneling Simulation Demo
- 55 MOSCap Demo
- 56 Thickness of the oxide
- 57 Thickness of the oxide
- 58 Thickness of the oxide
- 59 Thickness of the oxide
- 60 Thickness of the oxide
- 61 Thickness of the oxide
- 62 Oxide non-idealities
- 63 Oxide non-idealities
- 64 Fundamentals
- 65 Fundamentals
- 66 ALD of Alumina
- 67 ALD of Alumina
- 68 ALD of Alumina
- 69 ALD of Alumina
- 70 ALD vs. Others
- 71 ALD vs. Others
- 72 ALD Lab
- 73 ALD Lab
- 74 ALD Lab
- 75 ALD Lab
- 76 ALD Lab
- 77 Ellipsometer Simulation Demo
- 78 ALD Lab
- 79 ALD Lab
- 80 ALD Lab
- 81 ALD Demo
- 82 1 ALD Capabilities at Penn State
- 83 1 4 ALD, tools: 2 thermal & 2 plasma
- 84 1 Thickness measurement and mapping
- 85 1 ALD processes on Lesker LE
- 86 107:15 Comparison between different systems
- 87 1 Ellipsometer Demo
