Electron Beam Lithography - Drawing Images with Electrons

Electron Beam Lithography - Drawing Images with Electrons

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How do e-beam resists work?

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5 of 18

How do e-beam resists work?

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Electron Beam Lithography - Drawing Images with Electrons

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  1. 1 Intro
  2. 2 Electron Beam Lithography
  3. 3 Substrate Choice
  4. 4 PMMA Resist
  5. 5 How do e-beam resists work?
  6. 6 Development
  7. 7 Results!
  8. 8 Dose Dependence
  9. 9 Resist Thickness
  10. 10 Substrate
  11. 11 Accelerating Voltage
  12. 12 Proximity Effect
  13. 13 Emission Current
  14. 14 SEM vs EBL
  15. 15 Fast Beam Blanker
  16. 16 PMMA dosing - Positive vs Negative resist
  17. 17 Next Steps
  18. 18 Curiosity Rover Wheel!

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